Features | Products | Silicon Sensing Systems Japan - MEMS ring rate gyro
Features- MEMS Silicon Ring Gyro
The rate gyroscope uses the Coriolis effect on the sensor element (silicon vibrating resonator) to sense the speed of rotation ( rate of turn ).
Our proprietary micro-machined ring resonator shows best-in-class resistance against external shock / vibration and stability over a wide range of temperatures.
What's inside ?
The sensing element is a micromachined silicon ring suspended by the surrounding spokes.
The ring vibrated by inductive and capacitive effects and so on. Due to the Coriolis effect, the vibrating mode changes from primary to secondary vibration while turning.
The angular velocity can then be detected, being proportional to secondary vibration.
This is Silicon Sensing's patented technology.
See Motion View
Operating Principle of Silicon Ring Gyro
What's the merit of this ring structure?
Resistance to external shock and vibration.
Think of a hanging bell in the temple. When you hit the bell, the bell rings (primary and secondary vibration).
When you hit the supporting pillar (external shock), the bell will only swing but will not ring.
Also the drift due to temperature change is very small, and its repeatability is good.
Vibration tests in three planes, from 5Hz to 800Hz, show no resonances.
CRS series gyros have been selected by customers for many different applications due to their reliability compared to other gyros.