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Operating Principle, resonating frequency Coriolis forces | Products | Silicon Sensing Systems Japan - MEMS ring rate gyro

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Operating Principle- MEMS Silicon Ring Gyro

  • ・A vibration is exerted to the silicon ring at ring's resonating frequency (Mode 1).
  • Rotational motion produces Coriolis forces which couple vibration to a point 45 degrees relative to the driven axis (Mode 2).
  • ・Monitoring the mode-1 null point (node) in the mode-2 gives a direct measure of applied angular rate.
  • ・The above vibratory modes are unlikely to occur by external shock/vibrations, hence the rate gyroscope can maintain consistent performance in harsh environments.

MODE of VIBRATING

MODE of VIBRATING